Publication:
Ultra-miniaturized integrated cavities on high-resistivity silicon thin-film MCM-D technology
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1928 since deposited on 2021-10-17
1last month
Acq. date: 2026-04-05
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Statistics
Views
1928 since deposited on 2021-10-17
1last month
Acq. date: 2026-04-05
Citations