Assessing the resolution limits of scanning spreading resistance microscopy and scanning capacitance microscopy

dc.contributor.author	Eyben, Pierre
dc.contributor.author	Duhayon, Natasja
dc.contributor.author	Alvarez, David
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Eyben, Pierre
dc.contributor.imecauthor	Duhayon, Natasja
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.date.accessioned	2021-10-15T04:39:35Z
dc.date.available	2021-10-15T04:39:35Z
dc.date.issued	2003
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/7562
dc.source.beginpage	678
dc.source.conference	Characterization and Metrology for ULSI Technology
dc.source.conferencedate	24/03/2003
dc.source.conferencelocation	Austin, Texas USA
dc.source.endpage	684
dc.title	Assessing the resolution limits of scanning spreading resistance microscopy and scanning capacitance microscopy
dc.type	Proceedings paper
dspace.entity.type	Publication
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