Publication:
Towards a physical understanding of spreading resistance probe profiling
Date
| dc.contributor.author | Snauwaert, J. | |
| dc.contributor.author | Hellemans, L. | |
| dc.contributor.author | Czech, Ingrid | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Pawlik, M. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-29T12:48:11Z | |
| dc.date.available | 2021-09-29T12:48:11Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/363 | |
| dc.source.beginpage | 304 | |
| dc.source.endpage | 311 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of Vacuum Science and Technology B | |
| dc.source.volume | 12 | |
| dc.title | Towards a physical understanding of spreading resistance probe profiling | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |