Publication:

Advanced surface preparation leading into the nano-era

Date

2003
Presentation
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dc.contributor.authorOnsia, Bart
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorCaymax, Matty
dc.contributor.authorConard, Thierry
dc.contributor.authorHeyns, Marc
dc.contributor.authorLin, S.
dc.contributor.authorGreen, Martin
dc.contributor.authorTsai, Wilman
dc.contributor.imecauthorOnsia, Bart
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.date.accessioned2021-10-15T05:56:24Z
dc.date.available2021-10-15T05:56:24Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7956
dc.source.conferenceSemicon Europe 2003
dc.source.conferencedate31/03/2003
dc.source.conferencelocationMünchen Duitsland
dc.title

Advanced surface preparation leading into the nano-era

dc.typeOral presentation
dspace.entity.typePublication
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