La Doped HZO-Based 3D-Trench Metal-Ferroelectric-Metal Capacitors With High-Endurance (>10¹²) for FeRAM Applications

Walke, Amey; Popovici, Mihaela Ioana; Houshmand Sharifi, Shamin; Demir, Eyup Can; Puliyalil, Harinarayanan; Bizindavyi, Jasper; Yasin, Farrukh; Clima, Sergiu; Fantini, Andrea; Belmonte, Attilio; Kar, Gouri Sankar; Van Houdt, Jan

doi:10.1109/LED.2024.3368225

Publication:

La Doped HZO-Based 3D-Trench Metal-Ferroelectric-Metal Capacitors With High-Endurance (>10¹²) for FeRAM Applications

Date

2024

Journal article

https://doi.org/10.1109/LED.2024.3368225

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Walke, Amey

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Popovici, Mihaela Ioana

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Houshmand Sharifi, Shamin

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Demir, Eyup Can

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Puliyalil, Harinarayanan

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Journal

IEEE ELECTRON DEVICE LETTERS

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280 since deposited on 2024-07-10

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Acq. date: 2025-12-15

La Doped HZO-Based 3D-Trench Metal-Ferroelectric-Metal Capacitors With High-Endurance (>10¹²) for FeRAM Applications

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