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Aggressive scaling of Cu lowk: impact on metrology
Publication:
Aggressive scaling of Cu lowk: impact on metrology
Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Maex, Karen
;
Brongersma, Sywert
;
Iacopi, Francesca
;
Vanstreels, Kris
;
Travaly, Youssef
;
Baklanov, Mikhaïl
;
D'Haen, Jan
;
Beyer, Gerald
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1945
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1945
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations