Publication:
Evaluation of megasonic cleaning processes
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0009-0002-2123-452X | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtualsource.department | 89163bc6-d5be-4efa-ab7b-2ff202adf9e0 | |
| cris.virtualsource.department | dd3005c0-8363-45bf-815d-747b553d41da | |
| cris.virtualsource.orcid | 89163bc6-d5be-4efa-ab7b-2ff202adf9e0 | |
| cris.virtualsource.orcid | dd3005c0-8363-45bf-815d-747b553d41da | |
| dc.contributor.author | Holsteyns, Frank | |
| dc.contributor.author | Riskin, Alexander | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.imecauthor | Holsteyns, Frank | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.date.accessioned | 2021-10-15T04:55:42Z | |
| dc.date.available | 2021-10-15T04:55:42Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7657 | |
| dc.source.conference | 204th Meeting of the Electrochemical Society: 8th Int. Symp. on Cleaning Technology in Semiconductor Device Manufacturing | |
| dc.source.conferencedate | 13/10/2003 | |
| dc.source.conferencelocation | Orlando, FL USA | |
| dc.title | Evaluation of megasonic cleaning processes | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |