Publication:
Evaluation of megasonic cleaning processes
Date
| dc.contributor.author | Holsteyns, Frank | |
| dc.contributor.author | Riskin, Alexander | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.imecauthor | Holsteyns, Frank | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.date.accessioned | 2021-10-15T04:55:42Z | |
| dc.date.available | 2021-10-15T04:55:42Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7657 | |
| dc.source.conference | 204th Meeting of the Electrochemical Society: 8th Int. Symp. on Cleaning Technology in Semiconductor Device Manufacturing | |
| dc.source.conferencedate | 13/10/2003 | |
| dc.source.conferencelocation | Orlando, FL USA | |
| dc.title | Evaluation of megasonic cleaning processes | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |