Publication:

Non-destructive characterization of activated ion-implanted doping profiles based on photomodulated optical reflectance

Date

2010
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dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorClarysse, Trudo
dc.contributor.authorMoussa, Alain
dc.contributor.authorMody, Jay
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorRosseel, Erik
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorRosseel, Erik
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.accessioned2021-10-18T15:23:13Z
dc.date.available2021-10-18T15:23:13Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16770
dc.source.conference18th International Conference on Ion Implantation Technology
dc.source.conferencedate6/06/2010
dc.source.conferencelocationKyoto Japan
dc.title

Non-destructive characterization of activated ion-implanted doping profiles based on photomodulated optical reflectance

dc.typeOral presentation
dspace.entity.typePublication
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