Publication:
Mechanical stress in silicon microelectronics: assets and dangers
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-20T10:36:03Z | |
| dc.date.available | 2021-10-20T10:36:03Z | |
| dc.date.issued | 2012-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20569 | |
| dc.source.conference | 6th International Symposium on Advanced Science and Technology of Silicon Materials | |
| dc.source.conferencedate | 19/11/2012 | |
| dc.source.conferencelocation | Kona, HI USA | |
| dc.title | Mechanical stress in silicon microelectronics: assets and dangers | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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