Publication:

Unraveling the role of secondary electrons upon their interaction with photoresist during EUV exposure

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2281449

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Author(s)

Pollentier, Ivan

;

Vesters, Yannick

;

;

Vanelderen, Pieter

;

De Simone, Danilo

Metrics

1983 since deposited on 2021-10-24

3last month

Acq. date: 2025-12-11