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Full loop equivalent circuit model for plasma induced damage simulation
Publication:
Full loop equivalent circuit model for plasma induced damage simulation
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Date
2018
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38500.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hiblot, Gaspard
;
Van der Plas, Geert
Journal
IEEE Transactions on Plasma Science
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1966
since deposited on 2021-10-25
2
last month
Acq. date: 2025-12-15
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Metrics
Views
1966
since deposited on 2021-10-25
2
last month
Acq. date: 2025-12-15
Citations