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Fabrication of humidity monitoring sensor using porous silicon nitride structures for alkaline conditions
Publication:
Fabrication of humidity monitoring sensor using porous silicon nitride structures for alkaline conditions
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Date
2024
Journal article
https://doi.org/10.1016/j.snr.2024.100203
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Park, Soobin
;
Hwang, Inseong
;
Park, Jae Chan
;
Park, Tae Joo
;
Lee, Han-Seung
;
Lee, Sang Yeon
;
Yang, Hyun-Min
;
Yoo, Bongyoung
;
yeon
Journal
SENSORS AND ACTUATORS REPORTS
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Downloads
94
since deposited on 2024-07-02
17
last month
2
last week
Acq. date: 2025-12-09
Views
299
since deposited on 2024-07-02
1
last month
Acq. date: 2025-12-09
Citations