Publication:
MOCVD processes for electronic materials adopting Bi(C6H5)3 percursor: kinetics and mechanisms
Date
| dc.contributor.author | Bedoya, C. | |
| dc.contributor.author | Condorelli, G. | |
| dc.contributor.author | Anastasi, G. | |
| dc.contributor.author | Lisoni, Judit | |
| dc.contributor.author | Wouters, Dirk | |
| dc.contributor.author | Fragalà, I.L. | |
| dc.date.accessioned | 2021-10-15T12:41:50Z | |
| dc.date.available | 2021-10-15T12:41:50Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8553 | |
| dc.source.beginpage | D3.21 | |
| dc.source.conference | Integration of Advanced Micro- and Nano- Electronic Devices - Critical Issues and Solutions | |
| dc.source.conferencedate | 12/04/2004 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | MOCVD processes for electronic materials adopting Bi(C6H5)3 percursor: kinetics and mechanisms | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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