Publication:
Protein patterning on polycrystalline silicon–germanium via standard UV lithography for bioMEMS applications
Date
| dc.contributor.author | Lenci, Silvia | |
| dc.contributor.author | Tedeschi, Lorena | |
| dc.contributor.author | Domenici, Claudio | |
| dc.contributor.author | Lande, Caterina | |
| dc.contributor.author | Nannini, Andrea | |
| dc.contributor.author | Pennelli, Giovanni | |
| dc.contributor.author | Pieri, Francesco | |
| dc.contributor.author | Severi, Simone | |
| dc.contributor.imecauthor | Lenci, Silvia | |
| dc.contributor.imecauthor | Severi, Simone | |
| dc.date.accessioned | 2021-10-18T18:08:53Z | |
| dc.date.available | 2021-10-18T18:08:53Z | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 0928-4931 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17466 | |
| dc.source.beginpage | 1221 | |
| dc.source.endpage | 1226 | |
| dc.source.issue | 8 | |
| dc.source.journal | Materials Science and Engineering C | |
| dc.source.volume | 30 | |
| dc.title | Protein patterning on polycrystalline silicon–germanium via standard UV lithography for bioMEMS applications | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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