Publication:
Ion beam synthesis of TiSi2 in (100)Si and (111)Si
Date
| dc.contributor.author | Jin, S. | |
| dc.contributor.author | Chen, L. J. | |
| dc.date.accessioned | 2021-09-30T12:17:21Z | |
| dc.date.available | 2021-09-30T12:17:21Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2655 | |
| dc.source.beginpage | 360 | |
| dc.source.endpage | 364 | |
| dc.source.issue | 1_3 | |
| dc.source.journal | Materials Chemistry and Physics | |
| dc.source.volume | 54 | |
| dc.title | Ion beam synthesis of TiSi2 in (100)Si and (111)Si | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |