Publication:
Thermally-stable high effective work function TaCN and Ta2N films for pMOS metal gate applications
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1878 since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1878 since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations