Publication:
Stress measurements in Si microelectronics devices using Raman spectroscopy
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.date.accessioned | 2021-10-06T10:59:24Z | |
| dc.date.available | 2021-10-06T10:59:24Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3386 | |
| dc.source.beginpage | 877 | |
| dc.source.endpage | 883 | |
| dc.source.issue | 10 | |
| dc.source.journal | Journal of Raman Spectroscopy | |
| dc.source.volume | 30 | |
| dc.title | Stress measurements in Si microelectronics devices using Raman spectroscopy | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |