Publication:

Patterning challenges in setting up a 16nm node 6T-SRAM device using EUV lithography

Date

2011

Proceedings Paper

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Files

21318.pdf 1.03 MB

Author(s)

Vandeweyer, Tom

;

De Backer, Johan

;

Versluijs, Janko

;

Truffert, Vincent

;

Verhaegen, Staf

;

Ercken, Monique

;

Statistics

1941 since deposited on 2021-10-19

Acq. date: 2026-02-26