Publication:
Nanocrystalline diamond enhanced thickness shear mode resonator
Date
| dc.contributor.author | Williams, Oliver | |
| dc.contributor.author | Mortet, Vincent | |
| dc.contributor.author | Daenen, Michael | |
| dc.contributor.author | Haenen, Ken | |
| dc.contributor.imecauthor | Haenen, Ken | |
| dc.contributor.orcidimec | Haenen, Ken::0000-0001-6711-7367 | |
| dc.date.accessioned | 2021-10-16T21:44:50Z | |
| dc.date.available | 2021-10-16T21:44:50Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13228 | |
| dc.source.beginpage | 63514 | |
| dc.source.issue | 6 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 90 | |
| dc.title | Nanocrystalline diamond enhanced thickness shear mode resonator | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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