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Polycrystalline silicon-germanium electrode contact technology improvement for MEMS applications
Publication:
Polycrystalline silicon-germanium electrode contact technology improvement for MEMS applications
Date
2010
Proceedings Paper
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17733.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claes, Gert
;
Severi, Simone
;
Decoutere, Stefaan
;
Celis, Jean-Pierre
;
Witvrouw, Ann
Journal
Abstract
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Metrics
Views
1874
since deposited on 2021-10-18
413
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations