Publication:

Epitaxial Si, SiGe and Ge for high-performance devices

Date

2010
Presentation
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dc.contributor.authorLoo, Roger
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorVincent, Benjamin
dc.contributor.authorWang, Gang
dc.contributor.authorVanherle, Wendy
dc.contributor.authorGencarelli, Federica
dc.contributor.authorNguyen, Duy
dc.contributor.authorRosseel, Erik
dc.contributor.authorSouriau, Laurent
dc.contributor.authorRondas, Dirk
dc.contributor.authorDekoster, Johan
dc.contributor.authorCaymax, Matty
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorVanherle, Wendy
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorSouriau, Laurent
dc.contributor.imecauthorRondas, Dirk
dc.contributor.imecauthorDekoster, Johan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecSouriau, Laurent::0000-0002-5138-5938
dc.date.accessioned2021-10-18T18:29:33Z
dc.date.available2021-10-18T18:29:33Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17526
dc.source.conferenceASM User Meeting
dc.source.conferencedate23/09/2010
dc.source.conferencelocationMünchen Germany
dc.title

Epitaxial Si, SiGe and Ge for high-performance devices

dc.typeOral presentation
dspace.entity.typePublication
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