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Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization
Publication:
Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization
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Date
2012
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
van der Veen, Marleen
;
Vereecke, Bart
;
Masahito, Sugiura
;
Kashiwagi, Yusaku
;
Ke, Xiaoxing
;
Cott, Daire
;
Vanpaemel, Johannes
;
Vereecken, Philippe
;
De Gendt, Stefan
;
Huyghebaert, Cedric
;
Tokei, Zsolt
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1882
since deposited on 2021-10-20
Acq. date: 2025-12-12
Citations
Metrics
Views
1882
since deposited on 2021-10-20
Acq. date: 2025-12-12
Citations