Publication:

The effect of backside particles on substrate topography

Date

2005-10
Journal article
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dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorCompen, Rene
dc.contributor.authorvan Meer, Aschwin
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorDe Bisschop, Peter
dc.contributor.imecauthorHeyns, Marc
dc.date.accessioned2021-10-16T00:44:37Z
dc.date.available2021-10-16T00:44:37Z
dc.date.issued2005-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10071
dc.source.beginpage7409
dc.source.endpage7413
dc.source.issue10
dc.source.journalJapanese Journal of Applied Physics
dc.source.volume44
dc.title

The effect of backside particles on substrate topography

dc.typeJournal article
dspace.entity.typePublication
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