Publication:

Improved understanding and characterisation of rapid thermal oxides

Date

1996
Proceedings Paper
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dc.contributor.authorHorzel, Jörg
dc.contributor.authorStorm, Wolfgang
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorSivoththaman, Sivanarayanamoorthy
dc.contributor.authorNijs, Johan
dc.contributor.authorMertens, Robert
dc.contributor.authorAdriaenssens, G.
dc.contributor.imecauthorMertens, Robert
dc.date.accessioned2021-09-29T14:34:31Z
dc.date.available2021-09-29T14:34:31Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1264
dc.source.beginpage581
dc.source.conferenceConference Record of the 25th IEEE Photovoltaic Specialists Conference
dc.source.conferencedate13/05/1996
dc.source.conferencelocationWashington, DC USA
dc.source.endpage584
dc.title

Improved understanding and characterisation of rapid thermal oxides

dc.typeProceedings paper
dspace.entity.typePublication
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