Publication:

Dry cleaning of WS2 using reducing downstream plasma

Date

2019

Meeting abstract

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Author(s)

de Marneffe, Jean-Francois

;

Marinov, Daniil

;

;

;

;

Arutchelvan, Goutham

;

;

Mankelevitch, Yuri

;

Rakhimova, Tatyana

;

;

Asselberghs, Inge

;

De Gendt, Stefan

Statistics

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Acq. date: 2026-04-05