Publication:

Dry cleaning of WS2 using reducing downstream plasma

Date

2019
Meeting abstract
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Author(s)

de Marneffe, Jean-Francois  
;
Marinov, Daniil
;
Zhang, Jianran
;
With, Patrick
;
Smets, Quentin  
;
Arutchelvan, Goutham  
;
Voronina, E.
;
Mankelevitch, Yuri
;
Rakhimova, Tatyana
;
Bal, Kristof
;
Asselberghs, Inge  
;
De Gendt, Stefan  

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Abstract

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