Publication:

Dry cleaning of WS2 using reducing downstream plasma

Date

2019
Meeting abstract
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

de Marneffe, Jean-Francois  
;
Marinov, Daniil
;
Zhang, Jianran
;
With, Patrick
;
Smets, Quentin  
;
Arutchelvan, Goutham  
;
Voronina, E.
;
Mankelevitch, Yuri
;
Rakhimova, Tatyana
;
Bal, Kristof
;
Asselberghs, Inge  
;
De Gendt, Stefan  

Journal

Abstract

Description

Metrics

Views

2004 since deposited on 2021-10-27
2last month
1last week
Acq. date: 2025-12-10

Citations

Metrics

Views

2004 since deposited on 2021-10-27
2last month
1last week
Acq. date: 2025-12-10

Citations