Publication:

Zero-level packaging for (RF-)MEMS implementing TSVs and metal bonding

Date

2011
Proceedings Paper
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Author(s)

Pham, Nga  
;
Cherman, Vladimir  
;
Vandevelde, Bart  
;
Limaye, Paresh
;
Tutunjyan, Nina  
;
Jansen, Roelof  
;
Van Hoovels, Nele  
;
Sabuncuoglu Tezcan, Deniz  
;
Soussan, Philippe  
;
Beyne, Eric  
;
Tilmans, Harrie  

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2010 since deposited on 2021-10-19
Acq. date: 2026-10-10

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2010 since deposited on 2021-10-19
Acq. date: 2026-10-10

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