Publication:

A fast triple patterning solution with fix guidance

Date

2014
Proceedings Paper
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dc.contributor.authorFang, Weiping
dc.contributor.authorArikati, Srini
dc.contributor.authorCelingir, Erdem
dc.contributor.authorHug, Marco A.
dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorMailfert, Julien
dc.contributor.authorLucas, Kevin
dc.contributor.authorGao, Weimin
dc.contributor.imecauthorDe Bisschop, Peter
dc.contributor.imecauthorMailfert, Julien
dc.date.accessioned2021-10-22T01:25:22Z
dc.date.available2021-10-22T01:25:22Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23803
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1855794
dc.source.beginpage90530A
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability VIII
dc.source.conferencedate23/02/2014
dc.source.conferencelocationSan Jose, CA USA
dc.title

A fast triple patterning solution with fix guidance

dc.typeProceedings paper
dspace.entity.typePublication
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