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Measurement and evaluation of water uptake by resists, top coats and stacks and correlation with watermark defects
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Measurement and evaluation of water uptake by resists, top coats and stacks and correlation with watermark defects
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Date
2007
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Foubert, Philippe
;
Kocsis, Michael
;
Gronheid, Roel
;
Kishimura, Shinji
;
Soyano, Akimasa
;
Nafus, Kathleen
;
Stepanenko, Nickolay
;
De Backer, Johan
;
Vandenbroeck, Nadia
;
Ercken, Monique
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1939
since deposited on 2021-10-16
Acq. date: 2025-12-09
Citations
Metrics
Views
1939
since deposited on 2021-10-16
Acq. date: 2025-12-09
Citations