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Roles of hydrogen plasma on the growth of h-BN nanowalls in differing substrate stages and temperatures using rf sputtering

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dc.contributor.authorHoang, Duc-Quang
dc.contributor.authorJanssens, Stoffel
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorRuttens, Bart
dc.contributor.authorD'Haen, Jan
dc.contributor.authorHaenen, Ken
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorRuttens, Bart
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecRuttens, Bart::0000-0002-9116-6502
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-22T02:00:05Z
dc.date.available2021-10-22T02:00:05Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23942
dc.source.conferenceHasselt Diamond Workshop 2014 - SBDD XIX
dc.source.conferencedate19/02/2014
dc.source.conferencelocationHasselt Belgium
dc.title

Roles of hydrogen plasma on the growth of h-BN nanowalls in differing substrate stages and temperatures using rf sputtering

dc.typeOral presentation
dspace.entity.typePublication
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