Analytical electron microscopy of Si1-xGex/Si heterostructures and local isolation structures

dc.contributor.author	Armigliato, A.
dc.contributor.author	Balboni, R.
dc.contributor.author	Corticelli, F.
dc.contributor.author	Malvezzi, F.
dc.contributor.author	Vanhellemont, Jan
dc.date.accessioned	2021-09-29T13:04:10Z
dc.date.available	2021-09-29T13:04:10Z
dc.date.embargo	9999-12-31
dc.date.issued	1995
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/505
dc.source.beginpage	400
dc.source.endpage	406
dc.source.journal	Materials Science and Technology
dc.source.volume	11
dc.title	Analytical electron microscopy of Si1-xGex/Si heterostructures and local isolation structures
dc.type	Journal article
dspace.entity.type	Publication
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