Publication:
Integration of Directed Self-Assembly (DSA) via patterning in sub-7nm interconnects - A designer's perspective
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1882 since deposited on 2021-10-23
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Acq. date: 2026-04-05
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1882 since deposited on 2021-10-23
2last month
1last week
Acq. date: 2026-04-05
Citations