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Low field TDDB of BEOL interconnects using >40 months of data

Date

2013
Proceedings Paper
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dc.contributor.authorCroes, Kristof
dc.contributor.authorRoussel, Philippe
dc.contributor.authorBarbarin, Yohan
dc.contributor.authorWu, Chen
dc.contributor.authorLi, Yunlong
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.date.accessioned2021-10-21T07:05:29Z
dc.date.available2021-10-21T07:05:29Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22188
dc.source.beginpage2F.4
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate14/04/2013
dc.source.conferencelocationMonterey, CA USA
dc.title

Low field TDDB of BEOL interconnects using >40 months of data

dc.typeProceedings paper
dspace.entity.typePublication
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