Publication:

SiGe SEG growth for buried channels p-MOS devices

Date

2009
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLoo, Roger
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorTakeoka, Shinji
dc.contributor.authorGeypen, Jef
dc.contributor.authorBrijs, Bert
dc.contributor.authorMerckling, Clement
dc.contributor.authorCaymax, Matty
dc.contributor.authorDekoster, Johan
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDekoster, Johan
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.date.accessioned2021-10-17T22:55:27Z
dc.date.available2021-10-17T22:55:27Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15480
dc.source.beginpage2364
dc.source.conference216th ECS Meeting
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
dc.title

SiGe SEG growth for buried channels p-MOS devices

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
19311.pdf
Size:
193.2 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions