Publication:
Alternative EUV materials. Status at imec
Date
| dc.contributor.author | De Simone, Danilo | |
| dc.contributor.imecauthor | De Simone, Danilo | |
| dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
| dc.date.accessioned | 2021-10-22T18:52:41Z | |
| dc.date.available | 2021-10-22T18:52:41Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25154 | |
| dc.source.conference | International Symposium on Extreme Ultraviolet Lithography - EUVL. TWG meeting | |
| dc.source.conferencedate | 4/10/2015 | |
| dc.source.conferencelocation | Maastricht The Nederlands | |
| dc.title | Alternative EUV materials. Status at imec | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |