Publication:
Growth mechanisms and selectivity during atomic layer deposition
Date
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.date.accessioned | 2021-10-28T21:11:45Z | |
| dc.date.available | 2021-10-28T21:11:45Z | |
| dc.date.issued | 2020 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/35020 | |
| dc.identifier.url | https://ald2020.avs.org/wp-content/uploads/2020/02/Annelies-Delabie-Tutorial-2020.pdf | |
| dc.source.conference | AVS 20th International Conference on Atomic Layer Deposition (ALD 2020) - Tutorial | |
| dc.source.conferencedate | 28/06/2020 | |
| dc.source.conferencelocation | virtual conference virtual conference | |
| dc.title | Growth mechanisms and selectivity during atomic layer deposition | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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