Publication:
Editorial
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0009-0000-3384-8540 | |
| cris.virtualsource.department | 39ffd6c3-9161-4c05-9b59-66e46fdee6b8 | |
| cris.virtualsource.orcid | 39ffd6c3-9161-4c05-9b59-66e46fdee6b8 | |
| dc.contributor.author | Dusa, Mircea | |
| dc.contributor.author | Bickford, Jeanne P. | |
| dc.contributor.author | Lee, Chia-Yen | |
| dc.contributor.author | Uzsoy, Reha | |
| dc.contributor.imecauthor | Dusa, Mircea | |
| dc.contributor.orcidimec | Dusa, Mircea::0009-0000-3384-8540 | |
| dc.date.accessioned | 2025-03-07T21:02:40Z | |
| dc.date.available | 2025-03-07T21:02:40Z | |
| dc.date.issued | 2025-FEB | |
| dc.identifier.doi | 10.1109/TSM.2025.3533116 | |
| dc.identifier.issn | 0894-6507 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45353 | |
| dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | |
| dc.source.beginpage | 3 | |
| dc.source.endpage | 3 | |
| dc.source.issue | 1 | |
| dc.source.journal | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | |
| dc.source.numberofpages | 1 | |
| dc.source.volume | 38 | |
| dc.title | Editorial | |
| dc.type | Editorial material | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |