Publication:

Pulsed CVD/ALD of amorphous GeSe for application as OTS selector

Date

2019
Meeting abstract
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dc.contributor.authorHaider, Ali
dc.contributor.authorCaymax, Matty
dc.contributor.authorDeng, Shaoren
dc.contributor.authorSchapmans, Elie
dc.contributor.authorMaes, Jan
dc.contributor.authorGirard, Jean-Marc
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorEl Hajjam, Gabriel Khalil
dc.contributor.authorGoux, Ludovic
dc.contributor.authorDelhougne, Romain
dc.contributor.imecauthorHaider, Ali
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDeng, Shaoren
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.date.accessioned2021-10-27T09:57:34Z
dc.date.available2021-10-27T09:57:34Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33081
dc.identifier.urlhttps://www.eurocvd-balticald2019.lu/programme/detailed-programme/day-4-june-27-2019/
dc.source.conferenceEuroCVD 22 - Baltic ALD 16 Conference
dc.source.conferencedate24/06/2019
dc.source.conferencelocationLuxembourg Luxembourg
dc.title

Pulsed CVD/ALD of amorphous GeSe for application as OTS selector

dc.typeMeeting abstract
dspace.entity.typePublication
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