Publication:
Selective nucleation of PZT on pre-patterned IrO2
Date
| dc.contributor.author | Johnson, Jo | |
| dc.contributor.author | Lisoni, Judit | |
| dc.contributor.author | Wouters, Dirk | |
| dc.date.accessioned | 2021-10-14T21:56:42Z | |
| dc.date.available | 2021-10-14T21:56:42Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6447 | |
| dc.source.conference | E-MRS Spring Meeting Symposium P: Advanced Materials for Microelectronics: Ferroelectrics and Low-k Dielectrics | |
| dc.source.conferencedate | 18/06/2002 | |
| dc.source.conferencelocation | Strasbourg France | |
| dc.title | Selective nucleation of PZT on pre-patterned IrO2 | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
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