Publication:
Metal and polySi (Ge) micromechanical devices for high frequency application
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1989 since deposited on 2021-10-14
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Acq. date: 2025-10-25
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Metrics
Views
1989 since deposited on 2021-10-14
428item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations