Publication:

High-k gate dielectrics on Ge(100): effective electrical passivation using germanium oxide

Date

2007
Proceedings Paper
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dc.contributor.authorDelabie, Annelies
dc.contributor.authorBellenger, Florence
dc.contributor.authorHoussa, Michel
dc.contributor.authorConard, Thierry
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.contributor.authorMeuris, Marc
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMeuris, Marc
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-16T15:44:22Z
dc.date.available2021-10-16T15:44:22Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12036
dc.source.conferenceAVS Topical Conference on Atomic Layer Deposition - ALD
dc.source.conferencedate24/07/2007
dc.source.conferencelocationSan Diego, CA USA
dc.title

High-k gate dielectrics on Ge(100): effective electrical passivation using germanium oxide

dc.typeProceedings paper
dspace.entity.typePublication
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