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FinFET patterning process challenges
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1 since deposited on 2021-10-21
Acq. date: 2026-01-12
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1778 since deposited on 2021-10-21
Acq. date: 2026-01-12
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1 since deposited on 2021-10-21
Acq. date: 2026-01-12
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1778 since deposited on 2021-10-21
Acq. date: 2026-01-12
Citations