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Ultrathin EOT high-k/metal gate devices for future technologies: challenges, achievements and perspectives
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1903 since deposited on 2021-10-19
6last month
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Acq. date: 2026-01-09
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Views
1903 since deposited on 2021-10-19
6last month
1last week
Acq. date: 2026-01-09
Citations