Publication:
Hybrid analytical model for transduction efficiencies of electrostatically transduced bulk mode resonators
Date
| dc.contributor.author | Stoffels, Steve | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.author | Mertens, Robert | |
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.imecauthor | Stoffels, Steve | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.contributor.imecauthor | Mertens, Robert | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.date.accessioned | 2021-10-17T11:02:50Z | |
| dc.date.available | 2021-10-17T11:02:50Z | |
| dc.date.issued | 2008-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14519 | |
| dc.source.beginpage | 101 | |
| dc.source.conference | 19th MicrMechanics Workshop - MME | |
| dc.source.conferencedate | 28/09/2008 | |
| dc.source.conferencelocation | Aachen Germany | |
| dc.source.endpage | 104 | |
| dc.title | Hybrid analytical model for transduction efficiencies of electrostatically transduced bulk mode resonators | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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