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Articles
Techniques to study the reliability of metal RF MEMS capacitive switches
Publication:
Techniques to study the reliability of metal RF MEMS capacitive switches
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Date
2002
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6475.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Wolf, Ingrid
;
van Spengen, Merlijn
Journal
Microelectronics Reliability
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1870
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations
Metrics
Views
1870
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations