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Threshold voltage control in PMOSFETs with polysilicon or fully-Silicided gates on Hf-based gate dielectric using controlled lateral oxidation
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Threshold voltage control in PMOSFETs with polysilicon or fully-Silicided gates on Hf-based gate dielectric using controlled lateral oxidation
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Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kaushik, Vidya
;
Rohr, Erika
;
Hyun, S.
;
De Gendt, Stefan
;
Van Elshocht, Sven
;
Delabie, Annelies
;
Everaert, Jean-Luc
;
Veloso, Anabela
;
Brus, Stephan
;
Ragnarsson, Lars-Ake
;
Richard, Olivier
;
Caymax, Matty
;
Heyns, Marc
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1853
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Acq. date: 2025-12-13
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Metrics
Views
1853
since deposited on 2021-10-16
2
last month
Acq. date: 2025-12-13
Citations