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Threshold voltage control in PMOSFETs with polysilicon or fully-Silicided gates on Hf-based gate dielectric using controlled lateral oxidation
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1850 since deposited on 2021-10-16
Acq. date: 2025-10-23
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Metrics
Views
1850 since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations