Publication:

The ADEQUAT project for advanced CMOS process module development

Date

1996
Proceedings Paper
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dc.contributor.authorDe Keersmaecker, Roger
dc.contributor.imecauthorDe Keersmaecker, Roger
dc.date.accessioned2021-09-29T14:22:32Z
dc.date.available2021-09-29T14:22:32Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1161
dc.source.beginpage432
dc.source.conferenceProceedings 3rd International Conference on Electronics, Circuits and Systems - ICECS
dc.source.conferencedate13/10/1996
dc.source.conferencelocationRhodos Greece
dc.source.endpage435
dc.title

The ADEQUAT project for advanced CMOS process module development

dc.typeProceedings paper
dspace.entity.typePublication
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