Publication:

Imaging impact of multilayer tuning in EUV masks, experimental validation

Date

2014

Proceedings Paper

Simple item page Full metadata Statistics

Files

29596.pdf 1.13 MB

Author(s)

Philipsen, Vicky

;

Hendrickx, Eric

;

;

Raghunathan, Sudhar

;

;

Soltwisch, Victor

;

;

Davydova, Natalia

;

Mangat, Pawitter

Statistics

1983 since deposited on 2021-10-22

Acq. date: 2026-04-30