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Imaging impact of multilayer tuning in EUV masks, experimental validation
Publication:
Imaging impact of multilayer tuning in EUV masks, experimental validation
Date
2014
Proceedings Paper
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29596.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Philipsen, Vicky
;
Hendrickx, Eric
;
Verduijn, Erik
;
Raghunathan, Sudhar
;
Wood, Obert
;
Soltwisch, Victor
;
Scholze, Frank
;
Davydova, Natalia
;
Mangat, Pawitter
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1979
since deposited on 2021-10-22
Acq. date: 2025-10-24
Citations
Metrics
Views
1979
since deposited on 2021-10-22
Acq. date: 2025-10-24
Citations