Publication:
Characterization of carbon nanotubes based vertical interconnects
Date
| dc.contributor.author | Vereecke, Bart | |
| dc.contributor.author | van der Veen, Marleen | |
| dc.contributor.author | Barbarin, Yohan | |
| dc.contributor.author | Masahito, Sugiura | |
| dc.contributor.author | Kashiwagi, Yusaku | |
| dc.contributor.author | Cott, Daire | |
| dc.contributor.author | Huyghebaert, Cedric | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.imecauthor | Vereecke, Bart | |
| dc.contributor.imecauthor | van der Veen, Marleen | |
| dc.contributor.imecauthor | Cott, Daire | |
| dc.contributor.imecauthor | Huyghebaert, Cedric | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
| dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
| dc.date.accessioned | 2021-10-20T18:19:30Z | |
| dc.date.available | 2021-10-20T18:19:30Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21774 | |
| dc.source.beginpage | 648 | |
| dc.source.conference | International Conference on Solid State Devices and Materials - SSDM | |
| dc.source.conferencedate | 25/09/2012 | |
| dc.source.conferencelocation | Kyoto Japan | |
| dc.source.endpage | 649 | |
| dc.title | Characterization of carbon nanotubes based vertical interconnects | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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