Publication:

Wetting of deep hydrophilic nanoholes by aqueous solutions

Date

2021
Journal article
https://doi.org/10.1016/j.mee.2021.111515
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dc.contributor.authorVereecke, Guy
dc.contributor.authorDarcos, A.
dc.contributor.authorIlino, H.
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.imecauthorVereecke, G.
dc.contributor.imecauthorHolsteyns, F.
dc.contributor.imecauthorSanchez, E. Altamirano
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.accessioned2022-02-18T09:29:14Z
dc.date.available2022-02-18T09:29:14Z
dc.date.issued2021
dc.identifier.doi10.1016/j.mee.2021.111515
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38866
dc.publisherELSEVIER
dc.source.beginpage111515
dc.source.issuena
dc.source.journalMICROELECTRONIC ENGINEERING
dc.source.numberofpages5
dc.source.volume239
dc.title

Wetting of deep hydrophilic nanoholes by aqueous solutions

dc.typeJournal article
dspace.entity.typePublication
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