Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Evidence of a new degradation mechanism in high-k dielectrics at elevated temperatures
Publication:
Evidence of a new degradation mechanism in high-k dielectrics at elevated temperatures
Copy permalink
Date
2009
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
18443.pdf
554.82 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sahhaf, Sahar
;
Degraeve, Robin
;
O'Connor, Robert
;
Kaczer, Ben
;
Zahid, Mohammed
;
Roussel, Philippe
;
Pantisano, Luigi
;
Groeseneken, Guido
Journal
Abstract
Description
Metrics
Views
1944
since deposited on 2021-10-18
4
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1944
since deposited on 2021-10-18
4
last month
Acq. date: 2025-12-10
Citations